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Products Vacuum & Pressure Capacitance Manometers XacTorr® DMX Series
Questions? Call 1-888-554-3569

XacTorr® DMX Series Capacitance Diaphragm Gauge

Low Drift. EtherCAT® Enabled. Fab-Ready.
Models DMXA05 / DMXA10 / DMXA16

Engineered with next-generation features, the XacTorr® DMX Heated Capacitance Diaphragm Gauge sets a new standard for precision vacuum measurement in plasma-rich and high-purity environments. Unlike traditional digital vacuum gauges, XacTorr® DMX is engineered for extended uptime, faster tool cycles, and greater throughput, minimizing contamination and reducing unplanned downtime.

Proven Mark IV Sensor for Extended Tool Uptime

Our process-proven Mark IV sensor features a larger plasma shield and expanded guard volume to reduce particle contamination. The result: exceptional stability, ultra-low zero drift, and improved long-term process repeatability.

EtherCAT® Communication for Seamless Automation Integration

Equipped with EtherCAT® digital communication, XacTorr® DMX supports advanced process integration and real-time diagnostics, ideal for Industry 4.0-ready fabs.

Designed to Boost Wafer Throughput

With less downtime for sensor cleaning, semiconductor fabs using XacTorr® DMX can expect to produce dozens more wafers per tool annually. This increase in wafer output translates directly to higher fab efficiency and profitability.

Questions?

Talk to one of our application engineering experts by calling: 1-888-554-3569


For pricing information:

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Component datasource missing. Select a datasource for this component.

Features

  • Available for pressure ranges up to 1000 Torr
  • Mark IV high-stability sensor
  • New digital architecture
  • EtherCAT communications and analog output
  • Improved dual-zone temperature stability
  • USB diagnostic port standard
  • Setup, troubleshooting & calibration support via BEST (Brooks Expert Support Tool)

Benefits

  • Lower drift, superior protection from deposition of process gases
  • Elimination of manual potentiometers and drift associated with electronics
  • Fast warm-up, close temperature control, rapid response to changes
  • Multi-decade calibration provides superior window of known accuracy, real-time compensation of ambient temperature effects
  • Cannot be zeroed if pressure is too high or desired temperature not reached
  • Diagnostic port allows monitoring and data acquisition simultaneously with device operation for chamber and tool matching along with “real time” advanced troubleshooting

Applications

  • Semiconductor manufacturing equipment for Etch, ALD, CVD, PVD
  • Thin-film deposition processes – glass, web and optical coatings
  • Lyophilization
  • Industrial vacuum equipment
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Product Type
Capacitance Manometer
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Differentiator

Heated

Analog or Digital

 

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Performance
{0D03D875-C584-429E-AE01-319028378C3A}
Temperature

DMX05: 55°C

DMX10: 100°C

DMX16: 160°C

{8314F50D-C1BA-4889-AB93-9A8C4276EE49}
Pressure Range

1, 10, 100, 1000 Torr

{2EEC4C8A-A9AD-40AB-AD1A-D296EB1F3550}
Accuracy

DMX05, DMX10: 1-1000 Torr Ranges = 0.15% of Reading

DMX16: 1-1000 Torr Ranges = 0.25% of Reading

{2F3ED7CA-2A2D-44F5-BF42-DEC266726501}
Measurement Range
4 Decades
{8A91B729-D5C6-40E2-A44E-7B6C0AAD8FF3}
Temperature Effect

On Zero

0.002% FS / °C

 

On Span

0.02% FS / °C

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Mechanical
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Exposed Materials
Inconel® and/or AISI 316L Stainless Steel
{F42C62ED-9225-45AA-B7D4-1955D92E634C}
Over Pressure Limit
17 psia or 125% of Full Scale, whichever is greater
{6902915A-9CC6-4A5D-AD62-E6B57994A342}
Size
Full Size
{42473D9F-C139-4D41-AA13-8DF9452EF2C8}
Electrical
{826E54D7-6074-42ED-B388-32718F8A716E}
Analog Communication
0-10 Vdc 5k Ohm load
{C8929CDA-50A1-4114-A571-D9C39FDB55F1}
Digital Communication

EtherCAT®

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Electrical Connection

Analog via 15-Pin "D" connector

Dual RJ45 for EtherCAT

{CDE8096E-56B2-4A45-907A-FFE59F2FA2EA}
Power Supply / Consumption

DMX05: +24V ±10% @800 mA

DMX10: +24V ±10% @1 A

DMX16: +24V ±10% @1.5 A

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Certifications/Approvals
{725C9DC2-C4C1-4A84-BA1C-AC50713D1499}
EMC

EMC: 2014/30/EU EMC Directive EN:61326-1:2013

Environmental Compliance Directive: 2011/65/EU & 2015/863/EU RoHS Directive EC 1907/2006 REACH

DMXA05 DMXA10 DMXA16
Temperature 55°C 100°C 160°C
Pressure Range 1, 10, 100, 1000 Torr 1, 10, 100, 1000 Torr 1, 10, 100, 1000 Torr
Accuracy

0.15% of Reading (10%-100% FS)

0.15% of Reading (10%-100% FS)

0.25% of Reading (10%-100% FS)
Analog Output

0 - 10 Vdc

0 - 10 Vdc

0 - 10 Vdc
Communications

EtherCAT

EtherCAT

EtherCAT
Input Voltage

24 Vdc (Default)

24 Vdc (Default)

24 Vdc (Default)
Filename File Type Documents By Language
Data Sheet pdf English
Installation & Operation Manual pdf English

Use the following guide (model code information from data sheet) to translate the CAD configurations available below. If you need assistance or can’t find what you’re looking for, please contact Applications Engineering or your local Brooks Instrument representative.

Example: DMX-A-05-E0-2

Capacitance Manometer
 		Revision   Temperature
 		Communication
 		 Fitting

DMX

 

 

 

 

 

A

 

 

 

 

 

05 - 55°C

10 - 100°C

16 - 160°C

 

 

 

E0 - EtherCAT

E1 - EtherCAT Modified 15-Pin

 

 

 

 

2 - KF 16  Flange

4 - 8 VCR (1/2") Female

 

 

 

.


Filename File Type
DMX-A-10-E-2 zip
DMX-A-10-E-4 zip
DMX-A-16-E-4 zip
Brooks Expert Support Tool (BEST)
Brooks Expert Support Tool (BEST)
A Windows™ based application providing expanded control of Brooks Instrument MFCs and Pressure Controllers.
XacTorr® GUI (legacy)
XacTorr® GUI (legacy)
An independent means of communicating with the capacitance manometer without interrupting tool communications.