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Products Vacuum & Pressure Capacitance Manometers
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Capacitance Manometers for Accurate Pressure Measurement

Stable, Reliable Manometer Gauges for Critical Process Vacuum Measurement

Achieve exceptional measurement stability and reliability with Brooks Instrument high-performance capacitance manometers. Designed for the most demanding applications, these manometer gauges operate over a wide dynamic range with extremely good accuracy delivering repeatable readings over a long lifespan. Engineered for compatibility with high-purity systems and corrosive gasses, our manometers ensure minimal drift in the most critical vacuum processes.

KEY APPLICATIONS

  • Semiconductor manufacturing
  • Thin-film deposition processes – glass, web and optical coatings
  • Freeze drying perishable materials
  • Vacuum processing and deposition systems

Select the capacitance manometer that best meets your requirements.


PRODUCTS

XacTorr® CMX Series
XacTorr® CMX Series
CMC Series
CMC Series
Product Type Capacitance Manometer Capacitance Manometer
Differentiator

Heated or Unheated

Analog or Digital

 

Unheated
Pressure Range

0.1, 1, 2, 10, 20, 100, 1000 Torr

mBar & Pascal References Available

10, 20, 50, 100 and 1000 Torr Full Scale
Accuracy

CMX0: 0.25% of Reading

CMX1, CMX2: 1 to 1000 Torr Ranges = 0.15% of Reading

CMX1, CMX2: < 1 Torr Ranges = 0.25% of Reading

Type A = 0.25% of Reading

Type B = 0.50% of Reading
Temperature

CMX0 Ambient

CMX1 45°C

CMX2 100°C

CMX3 160°C

Ambient
Analog Communication 0-10 Vdc 5k Ohm load

0-10 Vdc (<10k Ohm load)
Digital Communication

DeviceNet™

RS485

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Size Full Size Compact